Buyers must prioritize Resolution (nm), which defines the minimum feature size the machine can print, and Overlay Accuracy, which ensures precise alignment of multiple layers. Additionally, evaluate the Light Source Wavelength (e.g., i-line 365nm, KrF 248nm, or ArF 193nm) as it determines the technology node capability. For industrial throughput, check the Wafers Per Hour (WPH) rating and the Numerical Aperture (NA) of the lens system, as these directly impact production efficiency and image contrast.